Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
Appearance
| Line 26: | Line 26: | ||
|- | |- | ||
|Process temperature | |Process temperature | ||
| | |60 <sup>o</sup>C | ||
70 <sup>o</sup>C | |||
80 <sup>o</sup>C | |||
|20 <sup>o</sup>C | |20 <sup>o</sup>C | ||
| Line 26: | Line 26: | ||
|- | |- | ||
|Process temperature | |Process temperature | ||
| | |60 <sup>o</sup>C | ||
70 <sup>o</sup>C | |||
80 <sup>o</sup>C | |||
|20 <sup>o</sup>C | |20 <sup>o</sup>C | ||