Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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== SEM pictures == | == SEM pictures == | ||
The wafers are diced into smaller pieces and sputter coated with Pt at DTU CEN before SEM inspection; please contact [mailto:ramona.mateiu@cen.dtu.dk|Ramona Valentina Mateiu] for further information. | |||
'''50nm''' | '''50nm''' | ||