Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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!width="200" |Secondary Ion Mass Spectroscopy | !width="200" |Secondary Ion Mass Spectroscopy | ||
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! Technique | |||
|| Non destructive excitation of X-rays in the sample. The elemental analysis is possible because the energy of these photons is characteristic of the element they emitted from. | || Non destructive excitation of X-rays in the sample. The elemental analysis is possible because the energy of these photons is characteristic of the element they emitted from. | ||
|| Destructive method that sputters off surface atoms with heavy ions. | || Destructive method that sputters off surface atoms with heavy ions. | ||
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! What elements are detected | |||
|| Any element heavier than boron/carbon | || Any element heavier than boron/carbon | ||
|| Any element | || Any element | ||
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! Chemical information | |||
|| None: Only transistions involving inner shell electrons are detected | || None: Only transistions involving inner shell electrons are detected | ||
|| None | || None | ||
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! Sample limitations | |||
|| Vacuum compatible | || Vacuum compatible | ||
|| Vacuum compatible | || Vacuum compatible | ||
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! Spatial resolution | |||
|| Very precise point-like analysis is possible with SEM electron beam. | || Very precise point-like analysis is possible with SEM electron beam. | ||
|| Limited to what is visible in a camera | || Limited to what is visible in a camera | ||
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! Depth resolution | |||
|| The size interaction volume depends on the SEM high voltage and sample density: The higher the SEM high voltage the bigger and deeper the interaction volume. The more dense the material is the smaller is the interaction volume | || The size interaction volume depends on the SEM high voltage and sample density: The higher the SEM high voltage the bigger and deeper the interaction volume. The more dense the material is the smaller is the interaction volume | ||
|| Depth profiling is | || Depth profiling is | ||
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! Detection limit | |||
|| Approximately 1 % atomic | || Approximately 1 % atomic | ||
|| Down to 1 ppb for many elements | || Down to 1 ppb for many elements | ||