Specific Process Knowledge/Lithography/CSAR: Difference between revisions

@@ Line 278: / Line 278: @@
 == SEM pictures ==
-=== 50nm ===
+'''50nm'''
 {| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable"
@@ Line 298: / Line 298: @@
 | [[File:CSAR50nmlines.png|250px]]
 | [[File:CSAR50nmlines+5%.png|250px]]
+|}
+'''30nm'''
+{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable"
+! width="100" | dose [muC/cm2]
+! width="250" | 207
+! width="250" | 219
+! width="250" | 230
+! width="250" | 242
+|-
+|
+| [[File:CSAR30nmoverview-10%.png|250px]]
+| [[File:CSAR30nmoverview-5%.png|250px]]
+| [[File:CSAR30nmoverview.png|250px]]
+| [[File:CSAR30nmoverview+5%.png|250px]]
+|-
+|
+| [[File:CSAR30nmlines-10%.png|250px]]
+| [[File:CSAR30nmlines-5%.png|250px]]
+| [[File:CSAR30nmlines.png|250px]]
+| [[File:CSAR30nmlines+5%.png|250px]]
 |}