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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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DCH-Employees-701
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=== 50nm ===
=== 50nm ===


{| cellpadding="2" style="border: 1px solid darkgray;"
{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable"
! width="100" | dose [muC/cm2]
! width="100" | dose [muC/cm2]
! width="250" | 207
! width="250" | 207
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