Jump to content

Specific Process Knowledge/Lithography/CSAR: Difference between revisions

← Older editNewer edit →
VisualWikitext
Tigre (talk | contribs)
DCH-Employees-701
2,257 edits
Tigre (talk | contribs)
DCH-Employees-701
2,257 edits
Line 282: Line 282:
{| cellpadding="2" style="border: 1px solid darkgray;"
{| cellpadding="2" style="border: 1px solid darkgray;"
! width="100" | dose [muC/cm2]
! width="100" | dose [muC/cm2]
! width="150" | 207
! width="250" | 207
! width="150" | 219
! width="250" | 219
! width="150" | 230
! width="250" | 230
! width="150" | 242
! width="250" | 242
|- border="0"
|- border="0"
|
|
| [[File:CSAR50nmoverview-10%.png|150px]]
| [[File:CSAR50nmoverview-10%.png|250px]]
| [[File:CSAR50nmoverview-5%.png|150px]]
| [[File:CSAR50nmoverview-5%.png|250px]]
| [[File:CSAR50nmoverview.png|150px]]
| [[File:CSAR50nmoverview.png|250px]]
| [[File:CSAR50nmoverview+5%.png|150px]]
| [[File:CSAR50nmoverview+5%.png|250px]]
|- align="center"
|- align="center"


|}
|}
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/CSAR"