Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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!width="200" |Secondary Ion Mass Spectroscopy | !width="200" |Secondary Ion Mass Spectroscopy | ||
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| Technique | | Technique | ||
| Non destructive excitation of X-rays in the sample. The elemental analysis is possible because the energy of these photons is characteristic of the element they emitted from. | || Non destructive excitation of X-rays in the sample. The elemental analysis is possible because the energy of these photons is characteristic of the element they emitted from. | ||
| Destructive method that sputters off surface atoms with heavy ions. | || Destructive method that sputters off surface atoms with heavy ions. | ||
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| What elements are detected | | What elements are detected | ||
| Any element heavier than boron/carbon | || Any element heavier than boron/carbon | ||
| Any element | || Any element | ||
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| Chemical information | | Chemical information | ||
| None: Only transistions involving inner shell electrons are detected | || None: Only transistions involving inner shell electrons are detected | ||
| None | || None | ||
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| Sample limitations | | Sample limitations | ||
| Vacuum compatible | || Vacuum compatible | ||
| Vacuum compatible | || Vacuum compatible | ||
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| Spatial resolution | | Spatial resolution | ||
| Very precise point-like analysis is possible with SEM electron beam. | || Very precise point-like analysis is possible with SEM electron beam. | ||
| Limited to what is visible in a camera | || Limited to what is visible in a camera | ||
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| Depth resolution | | Depth resolution | ||
| The size interaction volume depends on the SEM high voltage and sample density: | || The size interaction volume depends on the SEM high voltage and sample density: | ||
* The higher the SEM high voltage the bigger and deeper the interaction volume | * The higher the SEM high voltage the bigger and deeper the interaction volume | ||
* The more dense the material is the smaller is the interaction volume | * The more dense the material is the smaller is the interaction volume | ||
| Depth profiling is | || Depth profiling is | ||
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| Detection limit | | Detection limit | ||
| Approximately 1 % atomic | || Approximately 1 % atomic | ||
| Down to 1 ppb for many elements | || Down to 1 ppb for many elements | ||
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