Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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|Zeiss SEM Supra 60VP, D-3 | |Zeiss SEM Supra 60VP, D-3 | ||
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| | |Before characterization, wafers were sputter coated with 2-3 nm Pt at DTU CEN. | ||
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| Line 93: | Line 93: | ||
|Zeiss SEM Supra 60VP, D-3 | |Zeiss SEM Supra 60VP, D-3 | ||
| | | | ||
| | |Before characterization, wafers were sputter coated with 2-3 nm Pt at DTU CEN. | ||
|- | |- | ||