Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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When a solid sample is sputtered by primary ions of few keV energy, a fraction of the particles emitted from the target is ionized. Secondary Ion Mass Spectrometry consists of analyzing these secondary ions with a mass spectrometer. Secondary ion emission by a solid surface under ion bombardment supplies information about the elemental, isotopic and molecular composition of its uppermost atomic layers. | When a solid sample is sputtered by primary ions of few keV energy, a fraction of the particles emitted from the target is ionized. Secondary Ion Mass Spectrometry consists of analyzing these secondary ions with a mass spectrometer. Secondary ion emission by a solid surface under ion bombardment supplies information about the elemental, isotopic and molecular composition of its uppermost atomic layers. | ||
{| border="1" cellspacing="0" cellpadding="4" align="center" | {| border="1" cellspacing="0" cellpadding="4" align="center" | ||
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! Energy Dispersive X-ray Analysis | !width="50" | Energy Dispersive X-ray Analysis | ||
! Secondary Ion Mass Spectroscopy | !width="250" |Secondary Ion Mass Spectroscopy | ||
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| Technique | | Technique | ||