Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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# It is crucial to have your pattern ready in GDSII format. Check your GDS-file by importing it in e.g. <span class="plainlinks">[http://www.wieweb.com/ns6/index.html CleWin]</span> or L-edit. In order to reach the files from the computers inside the cleanroom it is recommended to either dropbox them or send them per email to yourself. | # It is crucial to have your pattern ready in GDSII format. Check your GDS-file by importing it in e.g. <span class="plainlinks">[http://www.wieweb.com/ns6/index.html CleWin]</span> or L-edit. In order to reach the files from the computers inside the cleanroom it is recommended to either dropbox them or send them per email to yourself. | ||
# Create sdf and jdf-files; download | # Create sdf and jdf-files; download [http://download.cnet.com/SuperEdi/3000-2352_4-10291091.html SuperEdi], read the sdf and jdf-file manual from technical documents found [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=292 here], find templates of sdf and jdf files on the cleanroom drive. | ||
# Assist a fully trained colleague of yours when she or he e-beam writes, gather as much knowledge about your e-beam run, i.e. which e-beam current, aperture and dose to use, which shot pitch (e.g. SHOT A,10). | # Assist a fully trained colleague of yours when she or he e-beam writes, gather as much knowledge about your e-beam run, i.e. which e-beam current, aperture and dose to use, which shot pitch (e.g. SHOT A,10). | ||
# Study the logbook for the e-beam writer: sheet 1 gives you an overview of which condition files (currents and apertures) have been in use recently by which user on which type of resist. On sheet 2 in this logbook you can find a writing time estimation program. | # Study the logbook for the e-beam writer: sheet 1 gives you an overview of which condition files (currents and apertures) have been in use recently by which user on which type of resist. On sheet 2 in this logbook you can find a writing time estimation program. | ||