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| <br clear="all" /> | | <br clear="all" /> |
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| =Spin Dryer Comparison Table=
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|
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| {| border="2" cellspacing="0" cellpadding="2"
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|
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| !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
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| |style="background:WhiteSmoke; color:black"|<b>Spin dryer 1</b>
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| |style="background:WhiteSmoke; color:black"|<b>Spin dryer 2</b>
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| |style="background:WhiteSmoke; color:black"|<b>Spin dryer 3</b>
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| |style="background:WhiteSmoke; color:black"|<b>Spin dryer 4</b>
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| |-
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| !style="background:silver; color:black;" align="center" width="60"|Location
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| |style="background:LightGrey; color:black"|
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| |style="background:WhiteSmoke; color:black"|
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| *CR3
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| |style="background:WhiteSmoke; color:black"|
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| *CR2
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| |style="background:WhiteSmoke; color:black"|
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| *CR4
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| |style="background:WhiteSmoke; color:black"|
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| *CR13
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| |-
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| !style="background:silver; color:black;" align="center" width="60"|Purpose
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| |style="background:LightGrey; color:black"|
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| |style="background:WhiteSmoke; color:black"|
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| *Drying
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| |style="background:WhiteSmoke; color:black"|
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| *Drying
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| |style="background:WhiteSmoke; color:black"|
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| *Drying
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| |style="background:WhiteSmoke; color:black"|
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| *Drying
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| *Rinsing + drying
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| |-
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| !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
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| |style="background:LightGrey; color:black"|Batch size
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| |style="background:WhiteSmoke; color:black"|
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| *<nowiki>#</nowiki> 100 mm wafers
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| |style="background:WhiteSmoke; color:black"|
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| *<nowiki>#</nowiki> 100 mm wafers
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| |style="background:WhiteSmoke; color:black"|
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| *<nowiki>#</nowiki> 100 mm wafers
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| *<nowiki>#</nowiki> 150 mm wafers
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| |style="background:WhiteSmoke; color:black"|
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| *<nowiki>#</nowiki> 50 mm wafers
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| *<nowiki>#</nowiki> 100 mm wafers
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| *<nowiki>#</nowiki> 150 mm wafers
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| |-
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| | style="background:LightGrey; color:black"|Allowed materials
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| |style="background:WhiteSmoke; color:black"|
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| *No restrictions
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| |style="background:WhiteSmoke; color:black"|
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| *Only for RCA cleaned wafers
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| |style="background:WhiteSmoke; color:black"|
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| *No restrictions
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| |style="background:WhiteSmoke; color:black"|
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| *No restrictions
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| |-
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| |}
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