Specific Process Knowledge/Wafer and sample drying: Difference between revisions
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*<nowiki>#</nowiki> 150 mm wafers | *<nowiki>#</nowiki> 150 mm wafers | ||
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* | *1 to 5 wafers per run. Sizes: 2”, 4" or 6" | ||
* Pieces (up to 10x10mm) | |||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
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*No restrictions | *No restrictions | ||
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*Si,SiO2, Si3N4 | |||
*Quartz and Pyrex | |||
*InAlP, GaAs | |||
*SU8 | |||
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=== Spin dryers === | === Spin dryers === | ||
=Spin Dryers= | =Spin Dryers= | ||