Specific Process Knowledge/Wafer and sample drying: Difference between revisions
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=Drying Comparison Table= | |||
{| border="2" cellspacing="0" cellpadding="2" | |||
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | |||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 1</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 2</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 3</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 4</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Critical point dryer</b> | |||
|- | |||
!style="background:silver; color:black;" align="center" width="60"|Location | |||
|style="background:LightGrey; color:black"| | |||
|style="background:WhiteSmoke; color:black"| | |||
*C-1 | |||
|style="background:WhiteSmoke; color:black"| | |||
*B-1 | |||
|style="background:WhiteSmoke; color:black"| | |||
*D-4 | |||
|style="background:WhiteSmoke; color:black"| | |||
*E-5 | |||
|style="background:WhiteSmoke; color:black"| | |||
*D-4 | |||
|- | |||
!style="background:silver; color:black;" align="center" width="60"|Purpose | |||
|style="background:LightGrey; color:black"| | |||
|style="background:WhiteSmoke; color:black"| | |||
*Drying | |||
|style="background:WhiteSmoke; color:black"| | |||
*Drying | |||
|style="background:WhiteSmoke; color:black"| | |||
*Drying | |||
|style="background:WhiteSmoke; color:black"| | |||
*Drying | |||
*Rinsing + drying | |||
|style="background:WhiteSmoke; color:black"| | |||
*Drying sensitive samples. E.g. with cantilevers | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | |||
|style="background:LightGrey; color:black"|Batch size | |||
|style="background:WhiteSmoke; color:black"| | |||
*<nowiki>#</nowiki> 100 mm wafers | |||
|style="background:WhiteSmoke; color:black"| | |||
*<nowiki>#</nowiki> 100 mm wafers | |||
|style="background:WhiteSmoke; color:black"| | |||
*<nowiki>#</nowiki> 100 mm wafers | |||
*<nowiki>#</nowiki> 150 mm wafers | |||
|style="background:WhiteSmoke; color:black"| | |||
*<nowiki>#</nowiki> 50 mm wafers | |||
*<nowiki>#</nowiki> 100 mm wafers | |||
*<nowiki>#</nowiki> 150 mm wafers | |||
|style="background:WhiteSmoke; color:black"| | |||
*One 100mm wafer | |||
|- | |||
| style="background:LightGrey; color:black"|Allowed materials | |||
|style="background:WhiteSmoke; color:black"| | |||
*No restrictions | |||
|style="background:WhiteSmoke; color:black"| | |||
*Only for RCA cleaned wafers | |||
|style="background:WhiteSmoke; color:black"| | |||
*No restrictions | |||
|style="background:WhiteSmoke; color:black"| | |||
*No restrictions | |||
|style="background:WhiteSmoke; color:black"| | |||
? | |||
|- | |||
|} | |||