Specific Process Knowledge/Characterization/Element analysis: Difference between revisions

Revision as of 18:01, 24 January 2008 view source Jml (talk \| contribs) Bureaucrats, danchip, Administrators 1,918 edits No edit summary ← Older edit		Revision as of 12:09, 28 January 2008 view source 192.38.87.87 (talk) No edit summary Newer edit →
Line 12:		Line 12:

	When a solid sample is sputtered by primary ions of few keV energy, a fraction of the particles emitted from the target is ionized. Secondary Ion Mass Spectrometry consists of analyzing these secondary ions with a mass spectrometer. Secondary ion emission by a solid surface under ion bombardment supplies information about the elemental, isotopic and molecular composition of its uppermost atomic layers.		When a solid sample is sputtered by primary ions of few keV energy, a fraction of the particles emitted from the target is ionized. Secondary Ion Mass Spectrometry consists of analyzing these secondary ions with a mass spectrometer. Secondary ion emission by a solid surface under ion bombardment supplies information about the elemental, isotopic and molecular composition of its uppermost atomic layers.




















	{\| border="1" cellspacing="0" cellpadding="4" align="center"		{\| border="1" cellspacing="0" cellpadding="4" align="center"