Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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There are two daily loading sessions where cassettes will be loaded into the autoloader by trained DTU Danchip personel: | There are two daily loading sessions where cassettes will be loaded into the autoloader by trained DTU Danchip personel: | ||
*10:00 | *10:00 | ||
*13:30 | *13:30 | ||
To use the e-beam writer, book the machine via LabManager, '''note number and type of substrate and which condition file to use in the description field in LabManager'''. Show up to the loading session before your exposure to mount your substrate and pre-align if necessary. | To use the e-beam writer, book the machine via LabManager, '''note number and type of substrate and which condition file to use in the description field in LabManager'''. Show up to the loading session before your exposure to mount your substrate and pre-align if necessary. | ||