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Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions

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To request for an e-beam training session, contact [mailto:e-beam@danchip.dtu.dk e-beam@danchip.dtu.dk]; a DTU Danchip personnel will hereafter provide a time slot. Users require '''at least 4 training sessions''' before being allowed full acccess to the machine. The first training will focus on file preparation and compilation alone.
To request for an e-beam training session, contact [mailto:e-beam@danchip.dtu.dk e-beam@danchip.dtu.dk]; a DTU Danchip personnel will hereafter provide a time slot. Users require '''at least 4 training sessions''' before being allowed full acccess to the machine. The first training will focus on file preparation and compilation alone.