Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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* study the logbook for the e-beam writer: sheet 1 gives you an overview of which condition files (currents and apertures) have been in use recently by which user on which type of resist. On sheet 2 in this logbook you can find a writing time estimation program. | * study the logbook for the e-beam writer: sheet 1 gives you an overview of which condition files (currents and apertures) have been in use recently by which user on which type of resist. On sheet 2 in this logbook you can find a writing time estimation program. | ||
* study the 3 manuals for the machine, they can be found here | |||
== General Rules == | == General Rules == | ||