Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
| Line 358: | Line 358: | ||
similar conditions will generate approximately | similar conditions will generate approximately | ||
: (0.53/1.00)·3.5 Å/s ≅ 2 Å/s | |||
The rates in this table are calculated based on a 500V cathode potential. As the power is | The rates in this table are calculated based on a 500V cathode potential. As the power is | ||
| Line 364: | Line 364: | ||
(up to 10%). For example, Aluminum at 250W | (up to 10%). For example, Aluminum at 250W | ||
: Al250W = 0.9·Al100W·(P1/P0) | |||
: 0.9·3.5 Å/s·(250/100) ≅ 7.4 Å/s | |||
The rates in the ceramics table assume the use of an RF power supply and account for the | The rates in the ceramics table assume the use of an RF power supply and account for the | ||