Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
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|ZrO(2)/Y(2)O(3)|| || 99,900% | |ZrO(2)/Y(2)O(3)|| || 99,900% | ||
|} | |} | ||
== | ==Relative Sputter rates== | ||
===Metals and semiconductors=== | ===Metals and semiconductors=== | ||
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