Specific Process Knowledge/Thermal Process/Dope with Boron: Difference between revisions
Appearance
No edit summary |
|||
| Line 8: | Line 8: | ||
<gallery caption="Boron profiles from SIMS " widths="200px" heights="200px" perrow="3"> | <gallery caption="Boron profiles from SIMS " widths="200px" heights="200px" perrow="3"> | ||
image:borprofil_1tim.jpg|1 hour | image:borprofil_1tim.jpg|1 hour, Temp=1125 <sup>o</sup>C | ||
image:borprofil_6tim.jpg|6 hours | image:borprofil_6tim.jpg|6 hours, Temp=1125 <sup>o</sup>C | ||
image:borprofil_16tim.jpg|16 hours | image:borprofil_16tim.jpg|16 hours, Temp=1125 <sup>o</sup>C | ||
</gallery> | </gallery> | ||
<gallery caption="Boron profiles from SIMS " widths="200px" heights="200px" perrow="3"> | <gallery caption="Boron profiles from SIMS " widths="200px" heights="200px" perrow="3"> | ||
image:borDiffusionDepthtable.jpg | image:borDiffusionDepthtable.jpg | ||
image:borDiffusionDepthplot.jpg | image:borDiffusionDepthplot.jpg | ||