Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
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|style="background:LightGrey; color:black"|Chemical solution | |style="background:LightGrey; color:black"|Chemical solution | ||
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*BHF 12%HF with Ammoniumflouride | *BHF (12%HF with Ammoniumflouride) | ||
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*5% HF | *5% HF | ||