Specific Process Knowledge/Etch/III-V ICP: Difference between revisions
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'''Etch recipes''' | '''Etch recipes''' | ||
*[[ | *[[/GaAsnano | GaAs nano etch ]] | ||
*[[ | *[[/InP-InGaAsP-InGaAs | InP/InGaAsP/InGaAs etch ]] | ||
*[[ | *[[/GaAs-AlGaAs | GaAs/AlGaAs etch ]] | ||
*[[ | *[[/GaN | GaN etch ]] | ||
==An overview of the performance of the III-V ICP and some process related parameters== | ==An overview of the performance of the III-V ICP and some process related parameters== | ||