Specific Process Knowledge/Etch/KOH Etch: Difference between revisions

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 At Danchip we use as a standard a 28 wt% KOH.
-Wet etching of aluminium is done with two different solutions:
-# H<math>_2</math>O:H<math>_3</math>PO<math>_4</math>  1:2 at 50 <sup>o</sup>C
-# Pre-mixed etch solution: PES 77-19-04 at 20 <sup>o</sup>C
-Both solutions are used in the Aluminium etch bath shown to the right. I must be written on which one is in. Solution no. 1 is the most used solution for etchning oure aluminium. Solution no. 2 is primarily for etching aluminium mixed with a small percentage of silicon.
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