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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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|-
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|-style="background:red; color:White"
|-style="background:green; color:White"
!colspan="7"|AllResist CSAR 1:1 in anisole, Spin Coater: Manual LabSpin A-5, TIGRE, 16-06-2014. Softbake 2 min @ 150 degC.
!colspan="7"|AllResist CSAR on Spin Coater: Manual LabSpin A-5, TIGRE, 16-06-2014. Softbake 2 min @ 150 degC.
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!Thickness [nm]
!Thickness [nm]
!St Dev
!St Dev
|-
|-
|-style="background:WhiteSmoke; color:black"
|2000
|4000
|83.48
|0.49
|-
|-


Line 208: Line 203:
|3000
|3000
|4000
|4000
|67.12
|201.61
|0.41
|1.20
|-
|-


Line 216: Line 211:
|4000
|4000
|4000
|4000
|58.64
|173.89
|0.44
|0.64
|-
|-


Line 224: Line 219:
|5000
|5000
|4000
|4000
|53.13
|155.91
|0.39
|0.65
|-
|-


|-
|-style="background:WhiteSmoke; color:black"
|6000
|4000
|48.76
|0.38
|-


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{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  style="width: 40%"
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  style="width: 40%"
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|-
|-
|-style="background:green; color:White"
|-style="background:red; color:White"
!colspan="7"|AllResist CSAR on Spin Coater: Manual LabSpin A-5, TIGRE, 16-06-2014. Softbake 2 min @ 150 degC.
!colspan="7"|AllResist CSAR 1:1 in anisole, Spin Coater: Manual LabSpin A-5, TIGRE, 16-06-2014. Softbake 2 min @ 150 degC.
|-
|-


Line 254: Line 240:
!Thickness [nm]
!Thickness [nm]
!St Dev
!St Dev
|-
|-
|-style="background:WhiteSmoke; color:black"
|2000
|4000
|83.48
|0.49
|-
|-


Line 260: Line 254:
|3000
|3000
|4000
|4000
|201.61
|67.12
|1.20
|0.41
|-
|-


Line 268: Line 262:
|4000
|4000
|4000
|4000
|173.89
|58.64
|0.64
|0.44
|-
|-


Line 276: Line 270:
|5000
|5000
|4000
|4000
|155.91
|53.13
|0.65
|0.39
|-
|-


|-
|-style="background:WhiteSmoke; color:black"
|6000
|4000
|48.76
|0.38
|-


|}
|}
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/CSAR"