Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" style="width: 40%" | |||
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|-style="background:red; color:White" | |||
!colspan="7"|AllResist CSAR 1:1 in anisole, Spin Coater: Manual LabSpin A-5, TIGRE, 16-06-2014. Softbake 2 min @ 150 degC. | |||
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|- | |||
|-style="background:silver; color:black" style="text-align:left;" | |||
!Spin Speed [rpm] | |||
!Acceleration [1/s2] | |||
!Thickness [nm] | |||
!St Dev | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|2000 | |||
|4000 | |||
|83.48 | |||
|0.49 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|3000 | |||
|4000 | |||
|67.12 | |||
|0.41 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|4000 | |||
|4000 | |||
|58.64 | |||
|0.44 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|5000 | |||
|4000 | |||
|53.13 | |||
|0.39 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|6000 | |||
|4000 | |||
|48.76 | |||
|0.38 | |||
|- | |||
|} | |||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" style="width: 40%" | |||
|- | |||
|- | |||
|-style="background:green; color:White" | |||
!colspan="7"|AllResist CSAR on Spin Coater: Manual LabSpin A-5, TIGRE, 16-06-2014. Softbake 2 min @ 150 degC. | |||
|- | |||
|- | |||
|-style="background:silver; color:black" style="text-align:left;" | |||
!Spin Speed [rpm] | |||
!Acceleration [1/s2] | |||
!Thickness [nm] | |||
!St Dev | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|3000 | |||
|4000 | |||
|201.61 | |||
|1.20 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|4000 | |||
|4000 | |||
|173.89 | |||
|0.64 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|5000 | |||
|4000 | |||
|155.91 | |||
|0.65 | |||
|- | |||
|} | |} | ||