Specific Process Knowledge/Lithography/CSAR: Difference between revisions
| Line 42: | Line 42: | ||
60 sec at various spin speed. | 60 sec at various spin speed. | ||
Acceleration 4000 s-2, | Acceleration 4000 s-2, | ||
softbake 5 min at 150 deg Celcius | softbake 1 - 5 min at 150 deg Celcius | ||
|Resist poured directly from bottle | |Resist poured directly from bottle | ||
|TIGRE, 09-04-2014 | |TIGRE, 09-04-2014 | ||