Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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Global marks formed as crosses with lengths of 1000 microns and 3-5 microns in width are recommended. | Global marks formed as crosses with lengths of 1000 microns and 3-5 microns in width are recommended. | ||
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= Proximity Error Correction = | = Proximity Error Correction = | ||