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Specific Process Knowledge: Difference between revisions

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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,315 edits
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|Deposition of PolySi doped with B or P
|Deposition of PolySi doped with B or P
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|-
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|[[Specific Process Knowledge/Thermal Process/Dope with Boron|Thermal Process/Dope with Boron]]
|Predeposition and drive-in
|Predeposition and drive-in
|Doping Silicon wafers with either B or P
|Doping Silicon wafers B
|-
|[[Specific Process Knowledge/Thermal Process/Dope with Boron|Thermal Process/Dope with Boron]]
|Predeposition and drive-in
|Doping Silicon wafers P
 
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|-
|Ionimplant
|Ionimplant
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