Specific Process Knowledge: Difference between revisions
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|LPCVD | |LPCVD | ||
|Deposition of PolySi doped with B or P | |Deposition of PolySi doped with B or P | ||
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|Predeposition and drive-in | |||
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|Ionimplant | |Ionimplant | ||
Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,317 edits |
Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,317 edits |
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| Line 336: | Line 336: | ||
|LPCVD | |LPCVD | ||
|Deposition of PolySi doped with B or P | |Deposition of PolySi doped with B or P | ||
|- | |||
| | |||
|Predeposition and drive-in | |||
| | |||
|- | |- | ||
|Ionimplant | |Ionimplant | ||