Specific Process Knowledge: Difference between revisions
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! Make a mask on your sample | ! Make a mask on your sample | ||
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!Entry page in LabAdviser | |||
!Techniques | |||
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|Lithography | |Lithography | ||
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|Photolithography | |||
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|Deep UV lithography | |||
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|E-beam lithography | |||
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|Imprinting | |Imprinting | ||
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Revision as of 13:18, 12 June 2014
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Choose the process topic you are interested in
The section below here is under construction 
Overview of sample processing
| Clean the sample File:Cleaning.jpg |
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| Drying Samples File:Drying.jpg |
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| Make a layer on the sample or Film Formation File:Making a layer 1.jpg | |
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| Thermal Oxide growth | |
| Physical Vapour Deposition | |
| Sputter deposition | |
| Thermal deposition | |
| E-beam evaporation | |
| CVD | |
| LPCVD | |
| PECVD | |
| Coating | |
| Spin coating | |
| Spray coating | |
| Electroplating | |
| Epitaxial growth |
| Thermal treatment of the sample File:Thermal treatment 1.jpg |
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Make a mask on the sample 
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| Lithography |
| Imprinting |
| Transfer pattern into the sample |
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| Wet etch |
| Dry etch |
| Lift-off |
| Direct structure definition |
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| Imprinting |
| LASER machining |
| Lithographic definition |
| Polymer Injection molding |
| Bonding samples together |
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| Characterize the sample |
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| Back end of the sample |
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| Chip/die mounting |
| Wire bonding |
| Dicing |
Overview of sample processing 2
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Overview of sample processing 3
| Clean your sample |
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| Drying your Samples |
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| Create a layer/film on your sample | ||
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| Entry page in LabAdviser | Techniques | Materials |
| Thermal Oxide growth | Furnaces | SiO2 |
| Thin film deposition | ||
| Sputter deposition | Si,SiO2,Si3N3,TiO2, metals | |
| Thermal evaporation | Al, ? | |
| E-beam evaporation | Metals | |
| LPCVD | Si3N4, SRN, SiO2, Si (poly and amorph) | |
| PECVD | Si3N4, SiO2, PBSG | |
| Electroplating | Ni | |
| Coating | ||
| Spin coating | resists, polymers | |
| Spray coating | resists, polymers | |
| Epitaxial growth | MOCVD | ? |
| Thermal treatment of your sample |
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| Make a mask on your sample | |
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| Entry page in LabAdviser | Techniques |
| Lithography | |
| Photolithography | |
| Deep UV lithography | |
| E-beam lithography | |
| Imprinting |
| Transfer mask pattern to your sample |
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| Wet etch |
| Dry etch |
| Lift-off |
| Direct structure definition on your sample |
|---|
| Imprinting |
| LASER machining |
| Lithographic definition |
| Polymer Injection molding |
| Bonding your samples together |
|---|
| Characterize your sample |
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| Back end processing of your sample |
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| Chip/die mounting |
| Wire bonding |
| Dicing |