Specific Process Knowledge: Difference between revisions
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==Overview of sample processing== | ==Overview of sample processing 3== | ||
{| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Clean the sample | ! Clean the sample |} | ||
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{| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Drying Samples | ! Drying Samples |} | ||
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{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Make a layer on the sample or Film Formation | ! Make a layer on the sample or Film Formation | ||
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|Thermal Oxide growth | |Thermal Oxide growth | ||
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{| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Thermal treatment of the sample | ! Thermal treatment of the sample | ||
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{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Make a mask on the sample | ! Make a mask on the sample | ||
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|Lithography | |Lithography | ||