Specific Process Knowledge: Difference between revisions

Make a layer on the sample File:Making a layer 1.jpg
Thermal Oxide growth
Thin Film deposition
	Sputter deposition
	Thermal deposition
	E-beam evaporation
CVD
	LPCVD
	PECVD
Coating
	Spin coating
	Spray coating
Electroplating
Epitaxial growth

Thermal treatment of the sample File:Thermal treatment 1.jpg

Make a mask on the sample
Lithography
Imprinting

Transfer pattern into the sample
Wet etch
Dry etch
Lift-off

Direct structure definition
Imprinting
LASER machining
Lithographic definition
Polymer Injection molding

Bonding samples together

Characterize the sample

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 |}
 {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
-!Transfer pattern into the sample
+! Transfer pattern into the sample
 |-
 |Wet etch
@@ Line 111: / Line 111: @@
 |}
 {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
-!Direct structure definition
+! Direct structure definition
 |-
 |Imprinting
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 |}
 {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
-!Back end of the sample
+! Back end of the sample
 |-
 |Chip/die mounting