Specific Process Knowledge: Difference between revisions
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{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | ||
!Make a layer on the sample | !Make a layer on the sample | ||
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|Thermal Oxide growth | |Thermal Oxide growth | ||
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|Thin Film deposition | |Thin Film deposition | ||
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|Sputter deposition | |Sputter deposition | ||
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|Thermal deposition | |Thermal deposition | ||
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|E-beam evaporation | |E-beam evaporation | ||
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|CVD | |CVD | ||
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|LPCVD | |LPCVD | ||
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|PECVD | |PECVD | ||
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|Coating | |Coating | ||
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|Spin coating | |Spin coating | ||
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|Spray coating | |Spray coating | ||
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|Electroplating | |Electroplating | ||
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|Epitaxial growth | |Epitaxial growth | ||
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Revision as of 14:18, 27 May 2014
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Overview of sample processing
Clean the sample |
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Drying Samples |
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Make a layer on the sample | |
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Thermal Oxide growth | |
Thin Film deposition | |
Sputter deposition | |
Thermal deposition | |
E-beam evaporation | |
CVD | |
LPCVD | |
PECVD | |
Coating | |
Spin coating | |
Spray coating | |
Electroplating | |
Epitaxial growth |
Thermal treatment of the sample |
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Make a mask on the sample | |
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Lithography | |
Imprinting |
Transfer pattern into the sample |
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Wet etch |
Dry etch |
Lift-off |
Direct structure definition |
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Imprinting |
LASER machining |
Lithographic definition |
Polymer Injection molding |
Bonding samples together |
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Characterize the sample |
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Back end of the sample |
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Chip/die mounting |
Wire bonding |
Dicing |