Specific Process Knowledge: Difference between revisions
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!Make a mask on the sample | !Make a mask on the sample | ||
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|Lithography | |||
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|Imprinting | |||
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!Transfer pattern into the sample | !Transfer pattern into the sample | ||
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|Wet etch | |||
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|Dry etch | |||
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|Lift-off | |||
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{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | ||
!Direct structure definition | !Direct structure definition | ||