Specific Process Knowledge: Difference between revisions
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*Clean the sample | *Clean the sample | ||
*Drying Samples | *Drying Samples | ||
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! | !Make a layer on the sample | ||
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|Thermal Oxide growth | |||
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| | |Thin Film deposition | ||
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|Sputter deposition | |||
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|Thermal deposition | |||
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|E-beam evaporation | |||
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|CVD | |||
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|LPCVD | |||
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|PECVD | |||
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|Coating | |||
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|Spin coating | |||
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|Spray coating | |||
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|Electroplating | |||
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|Epitaxial growth | |||
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*Thermal treatment of the sample | *Thermal treatment of the sample | ||
*Make a mask on the sample | *Make a mask on the sample |
Revision as of 12:01, 27 May 2014
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Sample processing:
- Clean the sample
- Drying Samples
Make a layer on the sample | ||
---|---|---|
Thermal Oxide growth | ||
Thin Film deposition | ||
Sputter deposition | ||
Thermal deposition | ||
E-beam evaporation | ||
CVD | ||
LPCVD | ||
PECVD | ||
Coating | ||
Spin coating | ||
Spray coating | ||
Electroplating | ||
Epitaxial growth |
- Thermal treatment of the sample
- Make a mask on the sample
- Lithography
- Imprinting
- Transfer pattern into the sample
- Wet etch
- Dry etch
- Lift-off
- Direct structure definition
- Imprinting
- LASER machining
- Lithographic definition
- Polymer Injection molding
- Bonding samples together
- Characterize the sample
- Back end of the sample
- Chip/die mounting
- Wire bonding
- Dicing