Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/fluence: Difference between revisions
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: <math>E_{pulse} = \frac{\overline{P}}{f}\,</math> | : <math>E_{pulse} = \frac{\overline{P}}{f}\,</math> | ||
Where <math>\overline{P}</math> (average power) | Where <math>\overline{P}</math> (average power) is measured with the laser sensor power measurement (see [http://labmanager.danchip.dtu.dk/d4Show.php?id=2885&mach=309|laser manual],section 5.3) and the repetion rate (<math>f</math>) is set in the parameter file under " laser frequency". | ||
The fluence is therefore determinate as such : | The fluence is therefore determinate as such : | ||