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Specific Process Knowledge/Lithography/ZEP520A: Difference between revisions

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{|border="0" cellspacing="0" cellpadding="3" style="text-align:left;"  style="width: 40%"
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|-style="background:green; color:White"
!colspan="7"|ZEON ZEP520A1:2 in anisole spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 21-05-2014. Resist was mixed 15-05-2014, i.e. approximatley 6 days old.
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|-
|-style="background:silver; color:black" style="text-align:left;"
!Spin Speed [rpm]
!Acceleration [1/s2]
!Thickness [nm]
!St Dev
|-
|-
|-style="background:WhiteSmoke; color:black"
|2000
|4000
|79.12
|1.74
|-
|-
|-style="background:WhiteSmoke; color:black"
|3000
|4000
|64.30
|0.34
|-
|-
|-style="background:WhiteSmoke; color:black"
|4000
|4000
|55.50
|0.48
|-
|-
|-style="background:WhiteSmoke; color:black"
|5000
|4000
|50.53
|0.62
|-
|-
|-style="background:WhiteSmoke; color:black"
|6000
|4000
|46.34
|1.01
|-
|-


|}
|}
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