Specific Process Knowledge/Lithography/ZEP520A: Difference between revisions
| Line 43: | Line 43: | ||
Acceleration 4000 s-2, | Acceleration 4000 s-2, | ||
softbake 2 min at 180 deg Celcius | softbake 2 min at 180 deg Celcius | ||
|Resist poured directly from bottle | |Resist poured directly from bottle or pippette | ||
|TIGRE, 23-04-2014 | |TIGRE, 23-04-2014 | ||
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