Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions
Appearance
| Line 48: | Line 48: | ||
! width="20%" |InGaAs | ! width="20%" |InGaAs | ||
|- | |- | ||
| | |1:1 | ||
|<5 | |<5 | ||
|<50 | |<50 | ||
| Line 48: | Line 48: | ||
! width="20%" |InGaAs | ! width="20%" |InGaAs | ||
|- | |- | ||
| | |1:1 | ||
|<5 | |<5 | ||
|<50 | |<50 | ||