Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions
No edit summary |
|||
| Line 5: | Line 5: | ||
It is utterly important that you dispose of chemicals/etches according to the DTU Danchip regulations; more information is found in the III-V cleanroom. | It is utterly important that you dispose of chemicals/etches according to the DTU Danchip regulations; more information is found in the III-V cleanroom. | ||
<br> | |||
==HCl:H3PO4 etch== | ==HCl:H3PO4 etch== | ||