Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions
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'''(1)''' Process '''SiO2thi1''' in PECVD2. '''(2)''' Ti from Titest.prg on Physimeca. It seems there is no measurable etchig during first 10 seconds. | '''(1)''' Process '''SiO2thi1''' in PECVD2. '''(2)''' Ti from Titest.prg on Physimeca. It seems there is no measurable etchig during first 10 seconds. | ||
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==Citric Acid etch== | ==Citric Acid etch== | ||