Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/fluence: Difference between revisions

Revision as of 09:00, 12 May 2014

Fluence definition

The fluence produces by a laser is, by definition, the energy delivered by a laser pulse ( $E_{p u l s e}$ ) per surface unit ( $S$ ) and it is given in J/cm2.

The function $E_{p u l s e}$ is defined as :

E_{p u l s e} = \frac{\overline{P}}{f}

Where $\overline{P}$ (average power) and is measured with the laser sensor power measurement (see manual,section 5.3) and the repetion rate ( $f$ ) is set in the parameter file under " laser frequency".

The fluence is therefore determinate as such :

F l u e n c e = \frac{E_{p u l s e}}{S}

The theoretical spot sizes ( $S$ ) can be found here

Fluence results measurement

Fluence result for IR wavelength (1064nm, F255mm)	Fluence result for green wavelength (532nm, F255mm)

@@ Line 9: / Line 9: @@
 : <math>E_{pulse} = \frac{\overline{P}}{f}\,</math>
-Where <math>\overline{P}</math> (average power) and is measured with the laser sensor power measurement (see laser manual section 5.3) and the repetion rate (<math>f</math>) is set in the parameter file under " laser frequency".
+Where <math>\overline{P}</math> (average power) and is measured with the laser sensor power measurement (see [http://labmanager.danchip.dtu.dk/d4Show.php?id=2885&mach=309|laser manual],section 5.3) and the repetion rate (<math>f</math>) is set in the parameter file under " laser frequency".
 The fluence is therefore determinate as such :