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Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions

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== Process information on PECVD2, PECVD3 (and PECVD1:<span style="color:Red">Expired!</span>)==
== Process information on PECVD2, PECVD3 (and PECVD1:<span style="color:Red">Expired!</span>)==
*Recipes for PECVD2 are in the III-V entry in LAbAdviser, see [[Specific Process Knowledge/III-V Process/thin film dep/pecvd2| here]]
*Recipes for PECVD2 are in the III-V entry in LAbAdviser, see [[Specific Process Knowledge/III-V Process/thin film dep/pecvd2| here]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using PECVD|Recipes on PECVD2 and PECVD3 for deposition of silicon oxides]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using PECVD|Recipes for deposition of silicon oxides]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using PECVD#Recipes on PECVD3 for deposition of silicon nitride and silicon oxynitride|Recipes on PECVD3 for deposition of silicon nitride and silicon oxynitride]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using PECVD#Recipes on PECVD3 for deposition of silicon nitride and silicon oxynitride|Recipes on for deposition of silicon nitride and silicon oxynitride]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using PECVD#Recipes on PECVD1 for deposition of silicon oxides|Recipes on PECVD1 for deposition of silicon oxide: <span style="color:Red">Expired!</span>]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using PECVD#Recipes on PECVD1 for deposition of silicon nitride and silicon oxynitride. <span style="color:Red">Expired!</span>:PECVD1 has been decommissioned| Recipes on PECVD1 for deposition of silicon nitride and silicon oxynitride: <span style="color:Red">Expired!</span>]]
 
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