Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions
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<!-- give the link to the equipment info page in LabManager: --> | <!-- give the link to the equipment info page in LabManager: --> | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=17 PECVD2 in LabManager] <br/> | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=17 PECVD2 in LabManager] <br/> | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=106 PECVD3 in LabManager] | ||
== Process information on PECVD2, PECVD3 (and PECVD1:<span style="color:Red">Expired!</span>)== | == Process information on PECVD2, PECVD3 (and PECVD1:<span style="color:Red">Expired!</span>)== | ||