Specific Process Knowledge/Etch/DRIE-Pegasus/SOIetch: Difference between revisions
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The SOI etch uses the Low frequency (LF) platen generator to minimize the notching at buried stop layers such as the BOX layer in a SOI wafer. | The SOI etch uses the Low frequency (LF) platen generator to minimize the notching at buried stop layers such as the BOX layer in a SOI wafer. | ||
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