Specific Process Knowledge: Difference between revisions

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*Make a layer on the sample
*Make a layer on the sample
**Thermal Oxide growth
**Thermal Oxide growth
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**Thin Film deposition
**Thin Film deposition
***PVD
***PVD

Revision as of 12:44, 30 April 2014

2nd Level - Process Topic

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Choose the process topic you are interested in

  • Lithography - New entry by the 18th of September - take a look

This section is under construction

Sample processing:

  • Clean the sample
  • Drying Samples
  • Make a layer on the sample
    • Thermal Oxide growth


    • Thin Film deposition
      • PVD
        • Sputter deposition
        • Thermal deposition
        • E-beam evaporation
      • CVD
        • LPCVD
        • PECVD
      • Coating
        • Spin coating
        • Spray coating
        • Electroplating
    • Epitaxial growth
  • Thermal treatment of the sample
  • Make a mask on the sample
    • Lithography
    • Imprinting
  • Transfer pattern into the sample
    • Wet etch
    • Dry etch
    • Lift-off
  • Direct structure definition
    • Imprinting
    • LASER machining
    • Lithographic definition
    • Polymer Injection molding
  • Bonding samples together
  • Characterize the sample
  • Back end of the sample
    • Chip/die mounting
    • Wire bonding
    • Dicing