Specific Process Knowledge: Difference between revisions
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*Drying Samples | *Drying Samples | ||
*Make a layer on the sample | *Make a layer on the sample | ||
*Thermal Oxide growth | **Thermal Oxide growth | ||
**PVD | **Thin Film deposition | ||
***Sputter deposition | ***PVD | ||
***Thermal deposition | ****Sputter deposition | ||
***E-beam evaporation | ****Thermal deposition | ||
**CVD | ****E-beam evaporation | ||
***LPCVD | ***CVD | ||
***PECVD | ****LPCVD | ||
**Coating | ****PECVD | ||
***Spin coating | ***Coating | ||
***Spray coating | ****Spin coating | ||
***Electroplating | ****Spray coating | ||
****Electroplating | |||
**Epitaxial growth | |||
*Thermal treatment of the sample | *Thermal treatment of the sample | ||
*Make a mask on the sample | *Make a mask on the sample | ||