Specific Process Knowledge/Characterization/Element analysis: Difference between revisions

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 You can make detailed analysis on the elemental composition and distribution in a sample with 3 instruments at Danchip. The [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/Leo|Leo SEM]] and [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/FEI|FEI SEM]] are both equipped with an X-ray detector that allows you to make elemental analysis by using the technique Energy Dispersive Analysis or EDX. The [[Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry|Atomika SIMS]] uses a technique called Secondary Ion Mass Spectrometry or SIMS.
+The technique of extracting information from the X-rays generated in a sample that is irradiated with electrons is called energy dispersive X-ray analysis or EDX. (Other acronyms are Energy Dispersive x-ray Spectroscopy, EDS, or Electron Probe Microanalysis, EPMA). The energetic electrons create core level vacancies as they collide with sample electrons in a multiple scattering process.
+As mentioned in section 2.2 one possible decay mechanism is the emission of X-rays. The energy of the photons is determined by the difference in energy of the shells involved. Since atomic shells are unique for every element so
+will be the transitions between them. Thus, every element has its own charateristic X-ray spectrum that can be used to determine the elemental composition.