Specific Process Knowledge/Lithography/ZEP520A: Difference between revisions
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This spin curve data performed with ZEP520A1:1 bottle opened 13-01-2014 (i.e. approximately 3 month old). | This spin curve data performed with ZEP520A1:1 bottle opened 13-01-2014 (i.e. approximately 3 month old). | ||
The thickness is measured on VASE Ellipsometer using a simple Cauchy model for a transparent polymer on Si. The measurements are performed at one incidence angle (70 degrees) only. 9 points on each 4" wafer has been measured; the standard deviation thus representing the homogeinity of the film on the 4" wafers. | The thickness is measured on VASE Ellipsometer using a simple Cauchy model for a transparent polymer on Si. The measurements are performed at one incidence angle (70 degrees) only. 9 points on each 4" wafer has been measured; the standard deviation thus representing the homogeinity of the film on the 4" wafers. | ||