Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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There is 3 instruments at Danchip that allows you to make an elemental analysis: The [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/Leo|Leo SEM]] and [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/FEI|FEI SEM]] are both equipped with an EDX detector. | |||
[[Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry|SIMS: Secondary Ion Mass Spectrometry]] | [[Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry|SIMS: Secondary Ion Mass Spectrometry]] | ||
[[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy|scanning electron microscopy]] | [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy|scanning electron microscopy]] | ||
Revision as of 14:22, 24 January 2008
There is 3 instruments at Danchip that allows you to make an elemental analysis: The Leo SEM and FEI SEM are both equipped with an EDX detector.